JPS5068539A - - Google Patents

Info

Publication number
JPS5068539A
JPS5068539A JP49120439A JP12043974A JPS5068539A JP S5068539 A JPS5068539 A JP S5068539A JP 49120439 A JP49120439 A JP 49120439A JP 12043974 A JP12043974 A JP 12043974A JP S5068539 A JPS5068539 A JP S5068539A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49120439A
Other versions
JPS569688B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5068539A publication Critical patent/JPS5068539A/ja
Publication of JPS569688B2 publication Critical patent/JPS569688B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Color Television Image Signal Generators (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP12043974A 1973-10-23 1974-10-21 Expired JPS569688B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732352957 DE2352957A1 (de) 1973-10-23 1973-10-23 Optisches verfahren zur beseitigung von fehlern in aus bildvorlagen gewonnenen abbildungen, die aus periodisch angeordneten aneinandergereihten einzelbildern bestehen

Publications (2)

Publication Number Publication Date
JPS5068539A true JPS5068539A (ja) 1975-06-07
JPS569688B2 JPS569688B2 (ja) 1981-03-03

Family

ID=5896127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12043974A Expired JPS569688B2 (ja) 1973-10-23 1974-10-21

Country Status (5)

Country Link
JP (1) JPS569688B2 (ja)
DE (1) DE2352957A1 (ja)
FR (1) FR2248526B1 (ja)
GB (1) GB1487399A (ja)
NL (1) NL7413743A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164781U (ja) * 1984-04-10 1985-11-01 古河電気工業株式会社 同軸コネクタ取付用圧着切断工具

Also Published As

Publication number Publication date
FR2248526B1 (ja) 1977-10-28
DE2352957A1 (de) 1975-04-30
JPS569688B2 (ja) 1981-03-03
GB1487399A (en) 1977-09-28
FR2248526A1 (ja) 1975-05-16
NL7413743A (nl) 1975-04-25

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