JPS5068528A - - Google Patents
Info
- Publication number
- JPS5068528A JPS5068528A JP11869273A JP11869273A JPS5068528A JP S5068528 A JPS5068528 A JP S5068528A JP 11869273 A JP11869273 A JP 11869273A JP 11869273 A JP11869273 A JP 11869273A JP S5068528 A JPS5068528 A JP S5068528A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Silver Salt Photography Or Processing Solution Therefor (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11869273A JPS5230849B2 (ja) | 1973-10-22 | 1973-10-22 | |
| US05/694,423 US4113486A (en) | 1973-10-22 | 1976-06-09 | Method for producing a photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11869273A JPS5230849B2 (ja) | 1973-10-22 | 1973-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5068528A true JPS5068528A (ja) | 1975-06-07 |
| JPS5230849B2 JPS5230849B2 (ja) | 1977-08-11 |
Family
ID=14742796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11869273A Expired JPS5230849B2 (ja) | 1973-10-22 | 1973-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5230849B2 (ja) |
-
1973
- 1973-10-22 JP JP11869273A patent/JPS5230849B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5230849B2 (ja) | 1977-08-11 |