JPS5067780A - - Google Patents
Info
- Publication number
- JPS5067780A JPS5067780A JP11927173A JP11927173A JPS5067780A JP S5067780 A JPS5067780 A JP S5067780A JP 11927173 A JP11927173 A JP 11927173A JP 11927173 A JP11927173 A JP 11927173A JP S5067780 A JPS5067780 A JP S5067780A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11927173A JPS5230156B2 (enExample) | 1973-10-23 | 1973-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11927173A JPS5230156B2 (enExample) | 1973-10-23 | 1973-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5067780A true JPS5067780A (enExample) | 1975-06-06 |
| JPS5230156B2 JPS5230156B2 (enExample) | 1977-08-05 |
Family
ID=14757215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11927173A Expired JPS5230156B2 (enExample) | 1973-10-23 | 1973-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5230156B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5312847U (enExample) * | 1976-07-15 | 1978-02-02 |
-
1973
- 1973-10-23 JP JP11927173A patent/JPS5230156B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5312847U (enExample) * | 1976-07-15 | 1978-02-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5230156B2 (enExample) | 1977-08-05 |