JPS5067733A - - Google Patents

Info

Publication number
JPS5067733A
JPS5067733A JP11847273A JP11847273A JPS5067733A JP S5067733 A JPS5067733 A JP S5067733A JP 11847273 A JP11847273 A JP 11847273A JP 11847273 A JP11847273 A JP 11847273A JP S5067733 A JPS5067733 A JP S5067733A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11847273A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11847273A priority Critical patent/JPS5067733A/ja
Publication of JPS5067733A publication Critical patent/JPS5067733A/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP11847273A 1973-10-23 1973-10-23 Pending JPS5067733A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11847273A JPS5067733A (enrdf_load_stackoverflow) 1973-10-23 1973-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11847273A JPS5067733A (enrdf_load_stackoverflow) 1973-10-23 1973-10-23

Publications (1)

Publication Number Publication Date
JPS5067733A true JPS5067733A (enrdf_load_stackoverflow) 1975-06-06

Family

ID=14737507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11847273A Pending JPS5067733A (enrdf_load_stackoverflow) 1973-10-23 1973-10-23

Country Status (1)

Country Link
JP (1) JPS5067733A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4670172A (en) * 1985-03-29 1987-06-02 Borg-Warner Corporation Process and kit for working metals
JPS6372866A (ja) * 1986-09-16 1988-04-02 Nippon Steel Corp 窒化チタンの装飾性コ−テイング方法
JP2012087323A (ja) * 2010-10-15 2012-05-10 Sumitomo Metal Mining Co Ltd 窒化チタンスパッタリングターゲットおよびその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832733A (enrdf_load_stackoverflow) * 1971-09-01 1973-05-02
JPS4834912A (enrdf_load_stackoverflow) * 1971-09-09 1973-05-23
JPS4841770A (enrdf_load_stackoverflow) * 1971-09-27 1973-06-18

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832733A (enrdf_load_stackoverflow) * 1971-09-01 1973-05-02
JPS4834912A (enrdf_load_stackoverflow) * 1971-09-09 1973-05-23
JPS4841770A (enrdf_load_stackoverflow) * 1971-09-27 1973-06-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4670172A (en) * 1985-03-29 1987-06-02 Borg-Warner Corporation Process and kit for working metals
JPS6372866A (ja) * 1986-09-16 1988-04-02 Nippon Steel Corp 窒化チタンの装飾性コ−テイング方法
JP2012087323A (ja) * 2010-10-15 2012-05-10 Sumitomo Metal Mining Co Ltd 窒化チタンスパッタリングターゲットおよびその製造方法

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