JPS5067733A - - Google Patents
Info
- Publication number
- JPS5067733A JPS5067733A JP11847273A JP11847273A JPS5067733A JP S5067733 A JPS5067733 A JP S5067733A JP 11847273 A JP11847273 A JP 11847273A JP 11847273 A JP11847273 A JP 11847273A JP S5067733 A JPS5067733 A JP S5067733A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11847273A JPS5067733A (cs) | 1973-10-23 | 1973-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11847273A JPS5067733A (cs) | 1973-10-23 | 1973-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5067733A true JPS5067733A (cs) | 1975-06-06 |
Family
ID=14737507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11847273A Pending JPS5067733A (cs) | 1973-10-23 | 1973-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5067733A (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4670172A (en) * | 1985-03-29 | 1987-06-02 | Borg-Warner Corporation | Process and kit for working metals |
| JPS6372866A (ja) * | 1986-09-16 | 1988-04-02 | Nippon Steel Corp | 窒化チタンの装飾性コ−テイング方法 |
| JP2012087323A (ja) * | 2010-10-15 | 2012-05-10 | Sumitomo Metal Mining Co Ltd | 窒化チタンスパッタリングターゲットおよびその製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4832733A (cs) * | 1971-09-01 | 1973-05-02 | ||
| JPS4834912A (cs) * | 1971-09-09 | 1973-05-23 | ||
| JPS4841770A (cs) * | 1971-09-27 | 1973-06-18 |
-
1973
- 1973-10-23 JP JP11847273A patent/JPS5067733A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4832733A (cs) * | 1971-09-01 | 1973-05-02 | ||
| JPS4834912A (cs) * | 1971-09-09 | 1973-05-23 | ||
| JPS4841770A (cs) * | 1971-09-27 | 1973-06-18 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4670172A (en) * | 1985-03-29 | 1987-06-02 | Borg-Warner Corporation | Process and kit for working metals |
| JPS6372866A (ja) * | 1986-09-16 | 1988-04-02 | Nippon Steel Corp | 窒化チタンの装飾性コ−テイング方法 |
| JP2012087323A (ja) * | 2010-10-15 | 2012-05-10 | Sumitomo Metal Mining Co Ltd | 窒化チタンスパッタリングターゲットおよびその製造方法 |