JPS5067556A - - Google Patents
Info
- Publication number
- JPS5067556A JPS5067556A JP11480273A JP11480273A JPS5067556A JP S5067556 A JPS5067556 A JP S5067556A JP 11480273 A JP11480273 A JP 11480273A JP 11480273 A JP11480273 A JP 11480273A JP S5067556 A JPS5067556 A JP S5067556A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11480273A JPS5067556A (zh) | 1973-10-15 | 1973-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11480273A JPS5067556A (zh) | 1973-10-15 | 1973-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5067556A true JPS5067556A (zh) | 1975-06-06 |
Family
ID=14647044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11480273A Pending JPS5067556A (zh) | 1973-10-15 | 1973-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5067556A (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50152568U (zh) * | 1974-06-03 | 1975-12-18 | ||
| JP2012505549A (ja) * | 2008-10-09 | 2012-03-01 | シエラ ソーラー パワー， インコーポレイテッド | シリコン蒸着のためのエピタキシャル反応器 |
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1973
- 1973-10-15 JP JP11480273A patent/JPS5067556A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50152568U (zh) * | 1974-06-03 | 1975-12-18 | ||
| JPS547485Y2 (zh) * | 1974-06-03 | 1979-04-07 | ||
| JP2012505549A (ja) * | 2008-10-09 | 2012-03-01 | シエラ ソーラー パワー， インコーポレイテッド | シリコン蒸着のためのエピタキシャル反応器 |