JPS5067157U - - Google Patents

Info

Publication number
JPS5067157U
JPS5067157U JP12570573U JP12570573U JPS5067157U JP S5067157 U JPS5067157 U JP S5067157U JP 12570573 U JP12570573 U JP 12570573U JP 12570573 U JP12570573 U JP 12570573U JP S5067157 U JPS5067157 U JP S5067157U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12570573U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12570573U priority Critical patent/JPS5067157U/ja
Publication of JPS5067157U publication Critical patent/JPS5067157U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP12570573U 1973-10-29 1973-10-29 Pending JPS5067157U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12570573U JPS5067157U (ja) 1973-10-29 1973-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12570573U JPS5067157U (ja) 1973-10-29 1973-10-29

Publications (1)

Publication Number Publication Date
JPS5067157U true JPS5067157U (ja) 1975-06-16

Family

ID=28376613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12570573U Pending JPS5067157U (ja) 1973-10-29 1973-10-29

Country Status (1)

Country Link
JP (1) JPS5067157U (ja)

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