JPS506671A - - Google Patents
Info
- Publication number
- JPS506671A JPS506671A JP5648473A JP5648473A JPS506671A JP S506671 A JPS506671 A JP S506671A JP 5648473 A JP5648473 A JP 5648473A JP 5648473 A JP5648473 A JP 5648473A JP S506671 A JPS506671 A JP S506671A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5648473A JPS5651904B2 (ja) | 1973-05-21 | 1973-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5648473A JPS5651904B2 (ja) | 1973-05-21 | 1973-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS506671A true JPS506671A (ja) | 1975-01-23 |
| JPS5651904B2 JPS5651904B2 (ja) | 1981-12-08 |
Family
ID=13028365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5648473A Expired JPS5651904B2 (ja) | 1973-05-21 | 1973-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5651904B2 (ja) |
-
1973
- 1973-05-21 JP JP5648473A patent/JPS5651904B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5651904B2 (ja) | 1981-12-08 |