JPS5066569U - - Google Patents

Info

Publication number
JPS5066569U
JPS5066569U JP1973122031U JP12203173U JPS5066569U JP S5066569 U JPS5066569 U JP S5066569U JP 1973122031 U JP1973122031 U JP 1973122031U JP 12203173 U JP12203173 U JP 12203173U JP S5066569 U JPS5066569 U JP S5066569U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1973122031U
Other versions
JPS5327494Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1973122031U priority Critical patent/JPS5327494Y2/ja
Publication of JPS5066569U publication Critical patent/JPS5066569U/ja
Application granted granted Critical
Publication of JPS5327494Y2 publication Critical patent/JPS5327494Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1973122031U 1973-10-19 1973-10-19 Expired JPS5327494Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1973122031U JPS5327494Y2 (ja) 1973-10-19 1973-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1973122031U JPS5327494Y2 (ja) 1973-10-19 1973-10-19

Publications (2)

Publication Number Publication Date
JPS5066569U true JPS5066569U (ja) 1975-06-14
JPS5327494Y2 JPS5327494Y2 (ja) 1978-07-12

Family

ID=28366229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1973122031U Expired JPS5327494Y2 (ja) 1973-10-19 1973-10-19

Country Status (1)

Country Link
JP (1) JPS5327494Y2 (ja)

Also Published As

Publication number Publication date
JPS5327494Y2 (ja) 1978-07-12

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