JPS5066179A - - Google Patents

Info

Publication number
JPS5066179A
JPS5066179A JP11391773A JP11391773A JPS5066179A JP S5066179 A JPS5066179 A JP S5066179A JP 11391773 A JP11391773 A JP 11391773A JP 11391773 A JP11391773 A JP 11391773A JP S5066179 A JPS5066179 A JP S5066179A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11391773A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11391773A priority Critical patent/JPS5066179A/ja
Publication of JPS5066179A publication Critical patent/JPS5066179A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11391773A 1973-10-12 1973-10-12 Pending JPS5066179A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11391773A JPS5066179A (ja) 1973-10-12 1973-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11391773A JPS5066179A (ja) 1973-10-12 1973-10-12

Publications (1)

Publication Number Publication Date
JPS5066179A true JPS5066179A (ja) 1975-06-04

Family

ID=14624414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11391773A Pending JPS5066179A (ja) 1973-10-12 1973-10-12

Country Status (1)

Country Link
JP (1) JPS5066179A (ja)

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