JPS5065481A - - Google Patents

Info

Publication number
JPS5065481A
JPS5065481A JP11480373A JP11480373A JPS5065481A JP S5065481 A JPS5065481 A JP S5065481A JP 11480373 A JP11480373 A JP 11480373A JP 11480373 A JP11480373 A JP 11480373A JP S5065481 A JPS5065481 A JP S5065481A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11480373A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11480373A priority Critical patent/JPS5065481A/ja
Publication of JPS5065481A publication Critical patent/JPS5065481A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11480373A 1973-10-15 1973-10-15 Pending JPS5065481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11480373A JPS5065481A (ja) 1973-10-15 1973-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11480373A JPS5065481A (ja) 1973-10-15 1973-10-15

Publications (1)

Publication Number Publication Date
JPS5065481A true JPS5065481A (ja) 1975-06-03

Family

ID=14647069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11480373A Pending JPS5065481A (ja) 1973-10-15 1973-10-15

Country Status (1)

Country Link
JP (1) JPS5065481A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50535A (ja) * 1973-05-09 1975-01-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50535A (ja) * 1973-05-09 1975-01-07

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