JPS5065477A - - Google Patents
Info
- Publication number
- JPS5065477A JPS5065477A JP11506773A JP11506773A JPS5065477A JP S5065477 A JPS5065477 A JP S5065477A JP 11506773 A JP11506773 A JP 11506773A JP 11506773 A JP11506773 A JP 11506773A JP S5065477 A JPS5065477 A JP S5065477A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11506773A JPS535866B2 (ja) | 1973-10-12 | 1973-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11506773A JPS535866B2 (ja) | 1973-10-12 | 1973-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5065477A true JPS5065477A (ja) | 1975-06-03 |
| JPS535866B2 JPS535866B2 (ja) | 1978-03-02 |
Family
ID=14653344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11506773A Expired JPS535866B2 (ja) | 1973-10-12 | 1973-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535866B2 (ja) |
-
1973
- 1973-10-12 JP JP11506773A patent/JPS535866B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS535866B2 (ja) | 1978-03-02 |