JPS5065182A - - Google Patents

Info

Publication number
JPS5065182A
JPS5065182A JP11352573A JP11352573A JPS5065182A JP S5065182 A JPS5065182 A JP S5065182A JP 11352573 A JP11352573 A JP 11352573A JP 11352573 A JP11352573 A JP 11352573A JP S5065182 A JPS5065182 A JP S5065182A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11352573A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11352573A priority Critical patent/JPS5065182A/ja
Publication of JPS5065182A publication Critical patent/JPS5065182A/ja
Pending legal-status Critical Current

Links

JP11352573A 1973-10-09 1973-10-09 Pending JPS5065182A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11352573A JPS5065182A (ja) 1973-10-09 1973-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11352573A JPS5065182A (ja) 1973-10-09 1973-10-09

Publications (1)

Publication Number Publication Date
JPS5065182A true JPS5065182A (ja) 1975-06-02

Family

ID=14614539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11352573A Pending JPS5065182A (ja) 1973-10-09 1973-10-09

Country Status (1)

Country Link
JP (1) JPS5065182A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178325A (en) * 1981-04-28 1982-11-02 Nec Corp X-ray exposer
JPS57182953A (en) * 1981-05-06 1982-11-11 Esu Retsudorei Robaato Microminiature focus x-ray tube
JPS61145831A (ja) * 1984-12-19 1986-07-03 Mitsubishi Electric Corp Ｘ線露光装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178325A (en) * 1981-04-28 1982-11-02 Nec Corp X-ray exposer
JPS57182953A (en) * 1981-05-06 1982-11-11 Esu Retsudorei Robaato Microminiature focus x-ray tube
JPS61145831A (ja) * 1984-12-19 1986-07-03 Mitsubishi Electric Corp Ｘ線露光装置

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