JPS506513B2 - - Google Patents
Info
- Publication number
- JPS506513B2 JPS506513B2 JP11717872A JP11717872A JPS506513B2 JP S506513 B2 JPS506513 B2 JP S506513B2 JP 11717872 A JP11717872 A JP 11717872A JP 11717872 A JP11717872 A JP 11717872A JP S506513 B2 JPS506513 B2 JP S506513B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11717872A JPS506513B2 (en) | 1972-11-24 | 1972-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11717872A JPS506513B2 (en) | 1972-11-24 | 1972-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4975695A JPS4975695A (en) | 1974-07-22 |
| JPS506513B2 true JPS506513B2 (en) | 1975-03-14 |
Family
ID=14705343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11717872A Expired JPS506513B2 (en) | 1972-11-24 | 1972-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS506513B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160140462A (en) * | 2015-05-27 | 2016-12-07 | 수스 마이크로텍 리소그라피 게엠바하 | Device for treating a disc-shaped substrate and support adapter |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221015A (en) * | 1975-08-11 | 1977-02-17 | Yamagishi Fukujirou | Manufacture of heattinsulating refractories |
-
1972
- 1972-11-24 JP JP11717872A patent/JPS506513B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160140462A (en) * | 2015-05-27 | 2016-12-07 | 수스 마이크로텍 리소그라피 게엠바하 | Device for treating a disc-shaped substrate and support adapter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4975695A (en) | 1974-07-22 |