JPS5064646U - - Google Patents

Info

Publication number
JPS5064646U
JPS5064646U JP12015873U JP12015873U JPS5064646U JP S5064646 U JPS5064646 U JP S5064646U JP 12015873 U JP12015873 U JP 12015873U JP 12015873 U JP12015873 U JP 12015873U JP S5064646 U JPS5064646 U JP S5064646U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12015873U
Other versions
JPS5349790Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1973120158U priority Critical patent/JPS5349790Y2/ja
Publication of JPS5064646U publication Critical patent/JPS5064646U/ja
Application granted granted Critical
Publication of JPS5349790Y2 publication Critical patent/JPS5349790Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1973120158U 1973-10-15 1973-10-15 Expired JPS5349790Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1973120158U JPS5349790Y2 (ja) 1973-10-15 1973-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1973120158U JPS5349790Y2 (ja) 1973-10-15 1973-10-15

Publications (2)

Publication Number Publication Date
JPS5064646U true JPS5064646U (ja) 1975-06-11
JPS5349790Y2 JPS5349790Y2 (ja) 1978-11-29

Family

ID=28360909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1973120158U Expired JPS5349790Y2 (ja) 1973-10-15 1973-10-15

Country Status (1)

Country Link
JP (1) JPS5349790Y2 (ja)

Also Published As

Publication number Publication date
JPS5349790Y2 (ja) 1978-11-29

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