JPS5064186A - - Google Patents
Info
- Publication number
- JPS5064186A JPS5064186A JP11388473A JP11388473A JPS5064186A JP S5064186 A JPS5064186 A JP S5064186A JP 11388473 A JP11388473 A JP 11388473A JP 11388473 A JP11388473 A JP 11388473A JP S5064186 A JPS5064186 A JP S5064186A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11388473A JPS5064186A (ja) | 1973-10-12 | 1973-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11388473A JPS5064186A (ja) | 1973-10-12 | 1973-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5064186A true JPS5064186A (ja) | 1975-05-31 |
Family
ID=14623525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11388473A Pending JPS5064186A (ja) | 1973-10-12 | 1973-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5064186A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6020510A (ja) * | 1983-07-13 | 1985-02-01 | Matsushita Electronics Corp | 不純物拡散方法 |
-
1973
- 1973-10-12 JP JP11388473A patent/JPS5064186A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6020510A (ja) * | 1983-07-13 | 1985-02-01 | Matsushita Electronics Corp | 不純物拡散方法 |