JPS5064181A - - Google Patents
Info
- Publication number
- JPS5064181A JPS5064181A JP11370873A JP11370873A JPS5064181A JP S5064181 A JPS5064181 A JP S5064181A JP 11370873 A JP11370873 A JP 11370873A JP 11370873 A JP11370873 A JP 11370873A JP S5064181 A JPS5064181 A JP S5064181A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11370873A JPS5239388B2 (ja) | 1973-10-09 | 1973-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11370873A JPS5239388B2 (ja) | 1973-10-09 | 1973-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5064181A true JPS5064181A (ja) | 1975-05-31 |
| JPS5239388B2 JPS5239388B2 (ja) | 1977-10-05 |
Family
ID=14619138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11370873A Expired JPS5239388B2 (ja) | 1973-10-09 | 1973-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5239388B2 (ja) |
-
1973
- 1973-10-09 JP JP11370873A patent/JPS5239388B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5239388B2 (ja) | 1977-10-05 |