JPS5064130A - - Google Patents
Info
- Publication number
- JPS5064130A JPS5064130A JP11427373A JP11427373A JPS5064130A JP S5064130 A JPS5064130 A JP S5064130A JP 11427373 A JP11427373 A JP 11427373A JP 11427373 A JP11427373 A JP 11427373A JP S5064130 A JPS5064130 A JP S5064130A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427373A JPS5064130A (ja) | 1973-10-11 | 1973-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427373A JPS5064130A (ja) | 1973-10-11 | 1973-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5064130A true JPS5064130A (ja) | 1975-05-31 |
Family
ID=14633678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11427373A Pending JPS5064130A (ja) | 1973-10-11 | 1973-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5064130A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254657U (ja) * | 1975-10-17 | 1977-04-20 | ||
| JPS52147462U (ja) * | 1976-05-04 | 1977-11-08 |
-
1973
- 1973-10-11 JP JP11427373A patent/JPS5064130A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254657U (ja) * | 1975-10-17 | 1977-04-20 | ||
| JPS52147462U (ja) * | 1976-05-04 | 1977-11-08 |