JPS5063883A - - Google Patents

Info

Publication number
JPS5063883A
JPS5063883A JP48112400A JP11240073A JPS5063883A JP S5063883 A JPS5063883 A JP S5063883A JP 48112400 A JP48112400 A JP 48112400A JP 11240073 A JP11240073 A JP 11240073A JP S5063883 A JPS5063883 A JP S5063883A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48112400A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48112400A priority Critical patent/JPS5063883A/ja
Publication of JPS5063883A publication Critical patent/JPS5063883A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP48112400A 1973-10-08 1973-10-08 Pending JPS5063883A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48112400A JPS5063883A (enrdf_load_stackoverflow) 1973-10-08 1973-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48112400A JPS5063883A (enrdf_load_stackoverflow) 1973-10-08 1973-10-08

Publications (1)

Publication Number Publication Date
JPS5063883A true JPS5063883A (enrdf_load_stackoverflow) 1975-05-30

Family

ID=14585698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48112400A Pending JPS5063883A (enrdf_load_stackoverflow) 1973-10-08 1973-10-08

Country Status (1)

Country Link
JP (1) JPS5063883A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480673A (en) * 1977-12-08 1979-06-27 Ibm Method of and device for producing epitaxial layer
JPS5624924A (en) * 1979-08-08 1981-03-10 Agency Of Ind Science & Technol Manufacture of solid thin film by ion beam
JPS583222A (ja) * 1981-06-29 1983-01-10 Fujitsu Ltd イオンビ−ム堆積法
JPS627140A (ja) * 1985-07-03 1987-01-14 Agency Of Ind Science & Technol 導電薄膜の堆積方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480673A (en) * 1977-12-08 1979-06-27 Ibm Method of and device for producing epitaxial layer
JPS5624924A (en) * 1979-08-08 1981-03-10 Agency Of Ind Science & Technol Manufacture of solid thin film by ion beam
JPS583222A (ja) * 1981-06-29 1983-01-10 Fujitsu Ltd イオンビ−ム堆積法
JPS627140A (ja) * 1985-07-03 1987-01-14 Agency Of Ind Science & Technol 導電薄膜の堆積方法

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