JPS5063881A - - Google Patents
Info
- Publication number
- JPS5063881A JPS5063881A JP11297573A JP11297573A JPS5063881A JP S5063881 A JPS5063881 A JP S5063881A JP 11297573 A JP11297573 A JP 11297573A JP 11297573 A JP11297573 A JP 11297573A JP S5063881 A JPS5063881 A JP S5063881A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11297573A JPS5063881A (ja) | 1973-10-08 | 1973-10-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11297573A JPS5063881A (ja) | 1973-10-08 | 1973-10-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5063881A true JPS5063881A (ja) | 1975-05-30 |
Family
ID=14600235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11297573A Pending JPS5063881A (ja) | 1973-10-08 | 1973-10-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5063881A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5363871A (en) * | 1976-11-18 | 1978-06-07 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
US4542579A (en) * | 1975-06-30 | 1985-09-24 | International Business Machines Corporation | Method for forming aluminum oxide dielectric isolation in integrated circuits |
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1973
- 1973-10-08 JP JP11297573A patent/JPS5063881A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4542579A (en) * | 1975-06-30 | 1985-09-24 | International Business Machines Corporation | Method for forming aluminum oxide dielectric isolation in integrated circuits |
JPS5363871A (en) * | 1976-11-18 | 1978-06-07 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |