JPS5063881A - - Google Patents

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Publication number
JPS5063881A
JPS5063881A JP11297573A JP11297573A JPS5063881A JP S5063881 A JPS5063881 A JP S5063881A JP 11297573 A JP11297573 A JP 11297573A JP 11297573 A JP11297573 A JP 11297573A JP S5063881 A JPS5063881 A JP S5063881A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11297573A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11297573A priority Critical patent/JPS5063881A/ja
Publication of JPS5063881A publication Critical patent/JPS5063881A/ja
Pending legal-status Critical Current

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  • Element Separation (AREA)
JP11297573A 1973-10-08 1973-10-08 Pending JPS5063881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11297573A JPS5063881A (ja) 1973-10-08 1973-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11297573A JPS5063881A (ja) 1973-10-08 1973-10-08

Publications (1)

Publication Number Publication Date
JPS5063881A true JPS5063881A (ja) 1975-05-30

Family

ID=14600235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11297573A Pending JPS5063881A (ja) 1973-10-08 1973-10-08

Country Status (1)

Country Link
JP (1) JPS5063881A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363871A (en) * 1976-11-18 1978-06-07 Matsushita Electric Ind Co Ltd Production of semiconductor device
US4542579A (en) * 1975-06-30 1985-09-24 International Business Machines Corporation Method for forming aluminum oxide dielectric isolation in integrated circuits

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542579A (en) * 1975-06-30 1985-09-24 International Business Machines Corporation Method for forming aluminum oxide dielectric isolation in integrated circuits
JPS5363871A (en) * 1976-11-18 1978-06-07 Matsushita Electric Ind Co Ltd Production of semiconductor device

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