JPS506293Y1 - - Google Patents
Info
- Publication number
- JPS506293Y1 JPS506293Y1 JP11884870U JP11884870U JPS506293Y1 JP S506293 Y1 JPS506293 Y1 JP S506293Y1 JP 11884870 U JP11884870 U JP 11884870U JP 11884870 U JP11884870 U JP 11884870U JP S506293 Y1 JPS506293 Y1 JP S506293Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11884870U JPS506293Y1 (en) | 1970-12-01 | 1970-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11884870U JPS506293Y1 (en) | 1970-12-01 | 1970-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS506293Y1 true JPS506293Y1 (en) | 1975-02-22 |
Family
ID=33083357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11884870U Expired JPS506293Y1 (en) | 1970-12-01 | 1970-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS506293Y1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006093207A (en) * | 2004-09-21 | 2006-04-06 | Hitachi Kokusai Electric Inc | Device of manufacturing semiconductor |
-
1970
- 1970-12-01 JP JP11884870U patent/JPS506293Y1/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006093207A (en) * | 2004-09-21 | 2006-04-06 | Hitachi Kokusai Electric Inc | Device of manufacturing semiconductor |
| JP4700309B2 (en) * | 2004-09-21 | 2011-06-15 | 株式会社日立国際電気 | Semiconductor manufacturing equipment and boat |