JPS5062181A - - Google Patents
Info
- Publication number
- JPS5062181A JPS5062181A JP11199073A JP11199073A JPS5062181A JP S5062181 A JPS5062181 A JP S5062181A JP 11199073 A JP11199073 A JP 11199073A JP 11199073 A JP11199073 A JP 11199073A JP S5062181 A JPS5062181 A JP S5062181A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11199073A JPS5062181A (cs) | 1973-10-05 | 1973-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11199073A JPS5062181A (cs) | 1973-10-05 | 1973-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5062181A true JPS5062181A (cs) | 1975-05-28 |
Family
ID=14575167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11199073A Pending JPS5062181A (cs) | 1973-10-05 | 1973-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5062181A (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50128688A (cs) * | 1974-03-29 | 1975-10-09 | ||
| JPS50149591A (cs) * | 1974-05-22 | 1975-11-29 | ||
| JPH04202767A (ja) * | 1990-11-30 | 1992-07-23 | Matsushita Electric Ind Co Ltd | イオンビーム発生装置および発生方法 |
-
1973
- 1973-10-05 JP JP11199073A patent/JPS5062181A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50128688A (cs) * | 1974-03-29 | 1975-10-09 | ||
| JPS50149591A (cs) * | 1974-05-22 | 1975-11-29 | ||
| JPH04202767A (ja) * | 1990-11-30 | 1992-07-23 | Matsushita Electric Ind Co Ltd | イオンビーム発生装置および発生方法 |