JPS5062180A - - Google Patents
Info
- Publication number
- JPS5062180A JPS5062180A JP11152073A JP11152073A JPS5062180A JP S5062180 A JPS5062180 A JP S5062180A JP 11152073 A JP11152073 A JP 11152073A JP 11152073 A JP11152073 A JP 11152073A JP S5062180 A JPS5062180 A JP S5062180A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11152073A JPS5062180A (ja) | 1973-10-05 | 1973-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11152073A JPS5062180A (ja) | 1973-10-05 | 1973-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5062180A true JPS5062180A (ja) | 1975-05-28 |
Family
ID=14563394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11152073A Pending JPS5062180A (ja) | 1973-10-05 | 1973-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5062180A (ja) |
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1973
- 1973-10-05 JP JP11152073A patent/JPS5062180A/ja active Pending