JPS5062179A - - Google Patents
Info
- Publication number
- JPS5062179A JPS5062179A JP11148573A JP11148573A JPS5062179A JP S5062179 A JPS5062179 A JP S5062179A JP 11148573 A JP11148573 A JP 11148573A JP 11148573 A JP11148573 A JP 11148573A JP S5062179 A JPS5062179 A JP S5062179A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11148573A JPS5224513B2 (ja) | 1973-10-05 | 1973-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11148573A JPS5224513B2 (ja) | 1973-10-05 | 1973-10-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5062179A true JPS5062179A (ja) | 1975-05-28 |
| JPS5224513B2 JPS5224513B2 (ja) | 1977-07-01 |
Family
ID=14562445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11148573A Expired JPS5224513B2 (ja) | 1973-10-05 | 1973-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5224513B2 (ja) |
-
1973
- 1973-10-05 JP JP11148573A patent/JPS5224513B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5224513B2 (ja) | 1977-07-01 |