JPS5060340U - - Google Patents

Info

Publication number
JPS5060340U
JPS5060340U JP11832373U JP11832373U JPS5060340U JP S5060340 U JPS5060340 U JP S5060340U JP 11832373 U JP11832373 U JP 11832373U JP 11832373 U JP11832373 U JP 11832373U JP S5060340 U JPS5060340 U JP S5060340U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11832373U
Other versions
JPS5412040Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1973118323U priority Critical patent/JPS5412040Y2/ja
Publication of JPS5060340U publication Critical patent/JPS5060340U/ja
Application granted granted Critical
Publication of JPS5412040Y2 publication Critical patent/JPS5412040Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1973118323U 1973-10-11 1973-10-11 Expired JPS5412040Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1973118323U JPS5412040Y2 (ja) 1973-10-11 1973-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1973118323U JPS5412040Y2 (ja) 1973-10-11 1973-10-11

Publications (2)

Publication Number Publication Date
JPS5060340U true JPS5060340U (ja) 1975-06-04
JPS5412040Y2 JPS5412040Y2 (ja) 1979-05-29

Family

ID=28355787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1973118323U Expired JPS5412040Y2 (ja) 1973-10-11 1973-10-11

Country Status (1)

Country Link
JP (1) JPS5412040Y2 (ja)

Also Published As

Publication number Publication date
JPS5412040Y2 (ja) 1979-05-29

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