JPS505949A - - Google Patents

Info

Publication number
JPS505949A
JPS505949A JP5618073A JP5618073A JPS505949A JP S505949 A JPS505949 A JP S505949A JP 5618073 A JP5618073 A JP 5618073A JP 5618073 A JP5618073 A JP 5618073A JP S505949 A JPS505949 A JP S505949A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5618073A
Other versions
JPS5217890B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5618073A priority Critical patent/JPS5217890B2/ja
Publication of JPS505949A publication Critical patent/JPS505949A/ja
Publication of JPS5217890B2 publication Critical patent/JPS5217890B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Linear Motors (AREA)
JP5618073A 1973-05-19 1973-05-19 Expired JPS5217890B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5618073A JPS5217890B2 (ja) 1973-05-19 1973-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5618073A JPS5217890B2 (ja) 1973-05-19 1973-05-19

Publications (2)

Publication Number Publication Date
JPS505949A true JPS505949A (ja) 1975-01-22
JPS5217890B2 JPS5217890B2 (ja) 1977-05-18

Family

ID=13019895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5618073A Expired JPS5217890B2 (ja) 1973-05-19 1973-05-19

Country Status (1)

Country Link
JP (1) JPS5217890B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140943A (en) * 1976-05-20 1977-11-24 Matsushita Electric Ind Co Ltd High-frequency heating unit
JPS5796255A (en) * 1980-12-05 1982-06-15 Oki Electric Ind Co Ltd Sludge detector
JP2016178184A (ja) * 2015-03-19 2016-10-06 東京エレクトロン株式会社 基板加熱装置及び基板加熱方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140943A (en) * 1976-05-20 1977-11-24 Matsushita Electric Ind Co Ltd High-frequency heating unit
JPS5796255A (en) * 1980-12-05 1982-06-15 Oki Electric Ind Co Ltd Sludge detector
JP2016178184A (ja) * 2015-03-19 2016-10-06 東京エレクトロン株式会社 基板加熱装置及び基板加熱方法

Also Published As

Publication number Publication date
JPS5217890B2 (ja) 1977-05-18

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