JPS5059105A - - Google Patents
Info
- Publication number
- JPS5059105A JPS5059105A JP10866973A JP10866973A JPS5059105A JP S5059105 A JPS5059105 A JP S5059105A JP 10866973 A JP10866973 A JP 10866973A JP 10866973 A JP10866973 A JP 10866973A JP S5059105 A JPS5059105 A JP S5059105A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10866973A JPS5630549B2 (ja) | 1973-09-27 | 1973-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10866973A JPS5630549B2 (ja) | 1973-09-27 | 1973-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5059105A true JPS5059105A (ja) | 1975-05-22 |
| JPS5630549B2 JPS5630549B2 (ja) | 1981-07-15 |
Family
ID=14490666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10866973A Expired JPS5630549B2 (ja) | 1973-09-27 | 1973-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5630549B2 (ja) |
-
1973
- 1973-09-27 JP JP10866973A patent/JPS5630549B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5630549B2 (ja) | 1981-07-15 |