JPS5057975A - - Google Patents

Info

Publication number
JPS5057975A
JPS5057975A JP10828173A JP10828173A JPS5057975A JP S5057975 A JPS5057975 A JP S5057975A JP 10828173 A JP10828173 A JP 10828173A JP 10828173 A JP10828173 A JP 10828173A JP S5057975 A JPS5057975 A JP S5057975A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10828173A
Other languages
Japanese (ja)
Other versions
JPS5339875B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10828173A priority Critical patent/JPS5339875B2/ja
Publication of JPS5057975A publication Critical patent/JPS5057975A/ja
Publication of JPS5339875B2 publication Critical patent/JPS5339875B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Physical Vapour Deposition (AREA)
JP10828173A 1973-09-25 1973-09-25 Expired JPS5339875B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10828173A JPS5339875B2 (en) 1973-09-25 1973-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10828173A JPS5339875B2 (en) 1973-09-25 1973-09-25

Publications (2)

Publication Number Publication Date
JPS5057975A true JPS5057975A (en) 1975-05-20
JPS5339875B2 JPS5339875B2 (en) 1978-10-24

Family

ID=14480657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10828173A Expired JPS5339875B2 (en) 1973-09-25 1973-09-25

Country Status (1)

Country Link
JP (1) JPS5339875B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107557732A (en) * 2017-08-29 2018-01-09 京东方科技集团股份有限公司 Mask plate and evaporation coating device, the evaporation process and method for testing thicknesses of layers is deposited

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107557732A (en) * 2017-08-29 2018-01-09 京东方科技集团股份有限公司 Mask plate and evaporation coating device, the evaporation process and method for testing thicknesses of layers is deposited
CN107557732B (en) * 2017-08-29 2019-06-07 京东方科技集团股份有限公司 Mask plate and evaporation coating device, evaporation process and the method for testing thicknesses of layers is deposited

Also Published As

Publication number Publication date
JPS5339875B2 (en) 1978-10-24

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