JPS5057606A - - Google Patents
Info
- Publication number
- JPS5057606A JPS5057606A JP10595773A JP10595773A JPS5057606A JP S5057606 A JPS5057606 A JP S5057606A JP 10595773 A JP10595773 A JP 10595773A JP 10595773 A JP10595773 A JP 10595773A JP S5057606 A JPS5057606 A JP S5057606A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10595773A JPS5057606A (cs) | 1973-09-21 | 1973-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10595773A JPS5057606A (cs) | 1973-09-21 | 1973-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5057606A true JPS5057606A (cs) | 1975-05-20 |
Family
ID=14421285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10595773A Pending JPS5057606A (cs) | 1973-09-21 | 1973-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5057606A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190112368A (ko) * | 2018-03-26 | 2019-10-07 | 주식회사 케이씨텍 | 기판 처리 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS425478Y1 (cs) * | 1964-10-12 | 1967-03-18 |
-
1973
- 1973-09-21 JP JP10595773A patent/JPS5057606A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS425478Y1 (cs) * | 1964-10-12 | 1967-03-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190112368A (ko) * | 2018-03-26 | 2019-10-07 | 주식회사 케이씨텍 | 기판 처리 장치 |