JPS5057244A - - Google Patents
Info
- Publication number
- JPS5057244A JPS5057244A JP10505273A JP10505273A JPS5057244A JP S5057244 A JPS5057244 A JP S5057244A JP 10505273 A JP10505273 A JP 10505273A JP 10505273 A JP10505273 A JP 10505273A JP S5057244 A JPS5057244 A JP S5057244A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10505273A JPS5057244A (ja) | 1973-09-19 | 1973-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10505273A JPS5057244A (ja) | 1973-09-19 | 1973-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5057244A true JPS5057244A (ja) | 1975-05-19 |
Family
ID=14397204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10505273A Pending JPS5057244A (ja) | 1973-09-19 | 1973-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5057244A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152411A (ja) * | 1987-09-17 | 1989-06-14 | Olympus Optical Co Ltd | 半導体露光装置の照明光学系 |
-
1973
- 1973-09-19 JP JP10505273A patent/JPS5057244A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152411A (ja) * | 1987-09-17 | 1989-06-14 | Olympus Optical Co Ltd | 半導体露光装置の照明光学系 |