JPS5057177A - - Google Patents
Info
- Publication number
- JPS5057177A JPS5057177A JP10383773A JP10383773A JPS5057177A JP S5057177 A JPS5057177 A JP S5057177A JP 10383773 A JP10383773 A JP 10383773A JP 10383773 A JP10383773 A JP 10383773A JP S5057177 A JPS5057177 A JP S5057177A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10383773A JPS5057177A (de) | 1973-09-17 | 1973-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10383773A JPS5057177A (de) | 1973-09-17 | 1973-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5057177A true JPS5057177A (de) | 1975-05-19 |
Family
ID=14364521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10383773A Pending JPS5057177A (de) | 1973-09-17 | 1973-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5057177A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259088A (ja) * | 1989-02-13 | 1990-10-19 | Internatl Business Mach Corp <Ibm> | 金属エツチング方法 |
-
1973
- 1973-09-17 JP JP10383773A patent/JPS5057177A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259088A (ja) * | 1989-02-13 | 1990-10-19 | Internatl Business Mach Corp <Ibm> | 金属エツチング方法 |