JPS5056166A - - Google Patents

Info

Publication number
JPS5056166A
JPS5056166A JP10399773A JP10399773A JPS5056166A JP S5056166 A JPS5056166 A JP S5056166A JP 10399773 A JP10399773 A JP 10399773A JP 10399773 A JP10399773 A JP 10399773A JP S5056166 A JPS5056166 A JP S5056166A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10399773A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10399773A priority Critical patent/JPS5056166A/ja
Publication of JPS5056166A publication Critical patent/JPS5056166A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP10399773A 1973-09-13 1973-09-13 Pending JPS5056166A (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10399773A JPS5056166A (enExample) 1973-09-13 1973-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10399773A JPS5056166A (enExample) 1973-09-13 1973-09-13

Publications (1)

Publication Number Publication Date
JPS5056166A true JPS5056166A (enExample) 1975-05-16

Family

ID=14368919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10399773A Pending JPS5056166A (enExample) 1973-09-13 1973-09-13

Country Status (1)

Country Link
JP (1) JPS5056166A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54160174A (en) * 1978-06-09 1979-12-18 Hitachi Ltd Washing device for electronic parts

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877663A (enExample) * 1972-01-20 1973-10-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877663A (enExample) * 1972-01-20 1973-10-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54160174A (en) * 1978-06-09 1979-12-18 Hitachi Ltd Washing device for electronic parts

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