JPS5055996A - - Google Patents

Info

Publication number
JPS5055996A
JPS5055996A JP48106143A JP10614373A JPS5055996A JP S5055996 A JPS5055996 A JP S5055996A JP 48106143 A JP48106143 A JP 48106143A JP 10614373 A JP10614373 A JP 10614373A JP S5055996 A JPS5055996 A JP S5055996A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48106143A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48106143A priority Critical patent/JPS5055996A/ja
Publication of JPS5055996A publication Critical patent/JPS5055996A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP48106143A 1973-09-20 1973-09-20 Pending JPS5055996A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48106143A JPS5055996A (ja) 1973-09-20 1973-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48106143A JPS5055996A (ja) 1973-09-20 1973-09-20

Publications (1)

Publication Number Publication Date
JPS5055996A true JPS5055996A (ja) 1975-05-16

Family

ID=14426126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48106143A Pending JPS5055996A (ja) 1973-09-20 1973-09-20

Country Status (1)

Country Link
JP (1) JPS5055996A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161764A (ja) * 1984-09-04 1986-03-29 Kosaka Kenkyusho:Kk 半導体ウエハの研磨方法および研磨用治具

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3429080A (en) * 1966-05-02 1969-02-25 Tizon Chem Corp Composition for polishing crystalline silicon and germanium and process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161764A (ja) * 1984-09-04 1986-03-29 Kosaka Kenkyusho:Kk 半導体ウエハの研磨方法および研磨用治具

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