JPS505571B1 - - Google Patents
Info
- Publication number
- JPS505571B1 JPS505571B1 JP1080370A JP1080370A JPS505571B1 JP S505571 B1 JPS505571 B1 JP S505571B1 JP 1080370 A JP1080370 A JP 1080370A JP 1080370 A JP1080370 A JP 1080370A JP S505571 B1 JPS505571 B1 JP S505571B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1080370A JPS505571B1 (en) | 1970-02-07 | 1970-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1080370A JPS505571B1 (en) | 1970-02-07 | 1970-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS505571B1 true JPS505571B1 (en) | 1975-03-05 |
Family
ID=11760482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1080370A Pending JPS505571B1 (en) | 1970-02-07 | 1970-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS505571B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160025454A (en) | 2014-08-27 | 2016-03-08 | 도쿄엘렉트론가부시키가이샤 | Substrate liquid processing apparatus |
-
1970
- 1970-02-07 JP JP1080370A patent/JPS505571B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160025454A (en) | 2014-08-27 | 2016-03-08 | 도쿄엘렉트론가부시키가이샤 | Substrate liquid processing apparatus |