JPS505562U - - Google Patents
Info
- Publication number
- JPS505562U JPS505562U JP5843973U JP5843973U JPS505562U JP S505562 U JPS505562 U JP S505562U JP 5843973 U JP5843973 U JP 5843973U JP 5843973 U JP5843973 U JP 5843973U JP S505562 U JPS505562 U JP S505562U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5843973U JPS505562U (ja) | 1973-05-17 | 1973-05-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5843973U JPS505562U (ja) | 1973-05-17 | 1973-05-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS505562U true JPS505562U (ja) | 1975-01-21 |
Family
ID=28215847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5843973U Pending JPS505562U (ja) | 1973-05-17 | 1973-05-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS505562U (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5534690A (en) * | 1978-09-04 | 1980-03-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Low pressure gas phase growing apparatus |
JP2015137415A (ja) * | 2014-01-24 | 2015-07-30 | エヌシーディ・カンパニー・リミテッドNcd Co.,Ltd. | 大面積原子層蒸着装置 |
JPWO2019124098A1 (ja) * | 2017-12-22 | 2020-08-20 | 株式会社村田製作所 | 成膜装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918263A (ja) * | 1972-06-08 | 1974-02-18 |
-
1973
- 1973-05-17 JP JP5843973U patent/JPS505562U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918263A (ja) * | 1972-06-08 | 1974-02-18 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5534690A (en) * | 1978-09-04 | 1980-03-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Low pressure gas phase growing apparatus |
JP2015137415A (ja) * | 2014-01-24 | 2015-07-30 | エヌシーディ・カンパニー・リミテッドNcd Co.,Ltd. | 大面積原子層蒸着装置 |
JPWO2019124098A1 (ja) * | 2017-12-22 | 2020-08-20 | 株式会社村田製作所 | 成膜装置 |
JP2022033870A (ja) * | 2017-12-22 | 2022-03-02 | 株式会社村田製作所 | 成膜装置 |