JPS5055333A - - Google Patents
Info
- Publication number
- JPS5055333A JPS5055333A JP48103565A JP10356573A JPS5055333A JP S5055333 A JPS5055333 A JP S5055333A JP 48103565 A JP48103565 A JP 48103565A JP 10356573 A JP10356573 A JP 10356573A JP S5055333 A JPS5055333 A JP S5055333A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48103565A JPS5055333A (ja) | 1973-09-13 | 1973-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48103565A JPS5055333A (ja) | 1973-09-13 | 1973-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5055333A true JPS5055333A (ja) | 1975-05-15 |
Family
ID=14357315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48103565A Pending JPS5055333A (ja) | 1973-09-13 | 1973-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5055333A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6151150A (ja) * | 1984-08-21 | 1986-03-13 | Sony Corp | パタ−ン形成方法及び露光装置 |
-
1973
- 1973-09-13 JP JP48103565A patent/JPS5055333A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6151150A (ja) * | 1984-08-21 | 1986-03-13 | Sony Corp | パタ−ン形成方法及び露光装置 |