JPS5053452U - - Google Patents

Info

Publication number
JPS5053452U
JPS5053452U JP10929073U JP10929073U JPS5053452U JP S5053452 U JPS5053452 U JP S5053452U JP 10929073 U JP10929073 U JP 10929073U JP 10929073 U JP10929073 U JP 10929073U JP S5053452 U JPS5053452 U JP S5053452U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10929073U
Other versions
JPS5231318Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10929073U priority Critical patent/JPS5231318Y2/ja
Publication of JPS5053452U publication Critical patent/JPS5053452U/ja
Application granted granted Critical
Publication of JPS5231318Y2 publication Critical patent/JPS5231318Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10929073U 1973-09-20 1973-09-20 Expired JPS5231318Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10929073U JPS5231318Y2 (ja) 1973-09-20 1973-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10929073U JPS5231318Y2 (ja) 1973-09-20 1973-09-20

Publications (2)

Publication Number Publication Date
JPS5053452U true JPS5053452U (ja) 1975-05-22
JPS5231318Y2 JPS5231318Y2 (ja) 1977-07-16

Family

ID=28330460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10929073U Expired JPS5231318Y2 (ja) 1973-09-20 1973-09-20

Country Status (1)

Country Link
JP (1) JPS5231318Y2 (ja)

Also Published As

Publication number Publication date
JPS5231318Y2 (ja) 1977-07-16

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