JPS5052244U - - Google Patents
Info
- Publication number
- JPS5052244U JPS5052244U JP10713973U JP10713973U JPS5052244U JP S5052244 U JPS5052244 U JP S5052244U JP 10713973 U JP10713973 U JP 10713973U JP 10713973 U JP10713973 U JP 10713973U JP S5052244 U JPS5052244 U JP S5052244U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10713973U JPS5052244U (ja) | 1973-09-14 | 1973-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10713973U JPS5052244U (ja) | 1973-09-14 | 1973-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5052244U true JPS5052244U (ja) | 1975-05-20 |
Family
ID=28324396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10713973U Pending JPS5052244U (ja) | 1973-09-14 | 1973-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5052244U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7381800B1 (ja) * | 2023-02-21 | 2023-11-16 | 株式会社アルバック | 真空蒸着装置用の蒸着源 |
-
1973
- 1973-09-14 JP JP10713973U patent/JPS5052244U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7381800B1 (ja) * | 2023-02-21 | 2023-11-16 | 株式会社アルバック | 真空蒸着装置用の蒸着源 |