JPS5050870A - - Google Patents

Info

Publication number
JPS5050870A
JPS5050870A JP48099204A JP9920473A JPS5050870A JP S5050870 A JPS5050870 A JP S5050870A JP 48099204 A JP48099204 A JP 48099204A JP 9920473 A JP9920473 A JP 9920473A JP S5050870 A JPS5050870 A JP S5050870A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48099204A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48099204A priority Critical patent/JPS5050870A/ja
Publication of JPS5050870A publication Critical patent/JPS5050870A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/741—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support the auxiliary support including a cavity for storing a finished or partly finished device during manufacturing or mounting, e.g. for an IC package or for a chip

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP48099204A 1973-09-05 1973-09-05 Pending JPS5050870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48099204A JPS5050870A (ja) 1973-09-05 1973-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48099204A JPS5050870A (ja) 1973-09-05 1973-09-05

Publications (1)

Publication Number Publication Date
JPS5050870A true JPS5050870A (ja) 1975-05-07

Family

ID=14241107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48099204A Pending JPS5050870A (ja) 1973-09-05 1973-09-05

Country Status (1)

Country Link
JP (1) JPS5050870A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58133936U (ja) * 1982-03-02 1983-09-09 三菱電機株式会社 チツプトレイ
JPS5948039U (ja) * 1982-09-24 1984-03-30 株式会社東芝 半導体チツプ用トレイ
JPS6022836U (ja) * 1983-07-23 1985-02-16 沖電気工業株式会社 試料ホルダ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58133936U (ja) * 1982-03-02 1983-09-09 三菱電機株式会社 チツプトレイ
JPS5948039U (ja) * 1982-09-24 1984-03-30 株式会社東芝 半導体チツプ用トレイ
JPS6022836U (ja) * 1983-07-23 1985-02-16 沖電気工業株式会社 試料ホルダ

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