JPS5050868A - - Google Patents
Info
- Publication number
- JPS5050868A JPS5050868A JP9920273A JP9920273A JPS5050868A JP S5050868 A JPS5050868 A JP S5050868A JP 9920273 A JP9920273 A JP 9920273A JP 9920273 A JP9920273 A JP 9920273A JP S5050868 A JPS5050868 A JP S5050868A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9920273A JPS5050868A (cs) | 1973-09-05 | 1973-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9920273A JPS5050868A (cs) | 1973-09-05 | 1973-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5050868A true JPS5050868A (cs) | 1975-05-07 |
Family
ID=14241050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9920273A Pending JPS5050868A (cs) | 1973-09-05 | 1973-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5050868A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54111285A (en) * | 1978-02-20 | 1979-08-31 | Nec Corp | Production of semiconductor device |
| JPS5593225A (en) * | 1979-01-10 | 1980-07-15 | Hitachi Ltd | Forming method of minute pattern |
-
1973
- 1973-09-05 JP JP9920273A patent/JPS5050868A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54111285A (en) * | 1978-02-20 | 1979-08-31 | Nec Corp | Production of semiconductor device |
| JPS5593225A (en) * | 1979-01-10 | 1980-07-15 | Hitachi Ltd | Forming method of minute pattern |