JPS5048952A - - Google Patents

Info

Publication number
JPS5048952A
JPS5048952A JP9727673A JP9727673A JPS5048952A JP S5048952 A JPS5048952 A JP S5048952A JP 9727673 A JP9727673 A JP 9727673A JP 9727673 A JP9727673 A JP 9727673A JP S5048952 A JPS5048952 A JP S5048952A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9727673A
Other versions
JPS5220276B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9727673A priority Critical patent/JPS5220276B2/ja
Publication of JPS5048952A publication Critical patent/JPS5048952A/ja
Publication of JPS5220276B2 publication Critical patent/JPS5220276B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP9727673A 1973-08-31 1973-08-31 Expired JPS5220276B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9727673A JPS5220276B2 (ja) 1973-08-31 1973-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9727673A JPS5220276B2 (ja) 1973-08-31 1973-08-31

Publications (2)

Publication Number Publication Date
JPS5048952A true JPS5048952A (ja) 1975-05-01
JPS5220276B2 JPS5220276B2 (ja) 1977-06-02

Family

ID=14187986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9727673A Expired JPS5220276B2 (ja) 1973-08-31 1973-08-31

Country Status (1)

Country Link
JP (1) JPS5220276B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52171462U (ja) * 1976-06-16 1977-12-27
JPS6128805A (ja) * 1984-07-20 1986-02-08 Toho Denshi Kogyo Kk 微細幅測定方法
JPS626104A (ja) * 1985-03-14 1987-01-13 Ando Electric Co Ltd 光による寸法測定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52171462U (ja) * 1976-06-16 1977-12-27
JPS6128805A (ja) * 1984-07-20 1986-02-08 Toho Denshi Kogyo Kk 微細幅測定方法
JPS626104A (ja) * 1985-03-14 1987-01-13 Ando Electric Co Ltd 光による寸法測定装置

Also Published As

Publication number Publication date
JPS5220276B2 (ja) 1977-06-02

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