JPS5048592A - - Google Patents
Info
- Publication number
- JPS5048592A JPS5048592A JP48097287A JP9728773A JPS5048592A JP S5048592 A JPS5048592 A JP S5048592A JP 48097287 A JP48097287 A JP 48097287A JP 9728773 A JP9728773 A JP 9728773A JP S5048592 A JPS5048592 A JP S5048592A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48097287A JPS5048592A (ja) | 1973-08-31 | 1973-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48097287A JPS5048592A (ja) | 1973-08-31 | 1973-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5048592A true JPS5048592A (ja) | 1975-04-30 |
Family
ID=14188280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48097287A Pending JPS5048592A (ja) | 1973-08-31 | 1973-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5048592A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851070A (ja) * | 1981-09-17 | 1983-03-25 | Canon Inc | 片面研摩研削方法 |
| WO2000025980A1 (en) * | 1998-10-30 | 2000-05-11 | Shin-Etsu Handotai Co., Ltd. | Method and apparatus for grinding wafer |
-
1973
- 1973-08-31 JP JP48097287A patent/JPS5048592A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851070A (ja) * | 1981-09-17 | 1983-03-25 | Canon Inc | 片面研摩研削方法 |
| WO2000025980A1 (en) * | 1998-10-30 | 2000-05-11 | Shin-Etsu Handotai Co., Ltd. | Method and apparatus for grinding wafer |