JPS5047482U - - Google Patents

Info

Publication number
JPS5047482U
JPS5047482U JP10093873U JP10093873U JPS5047482U JP S5047482 U JPS5047482 U JP S5047482U JP 10093873 U JP10093873 U JP 10093873U JP 10093873 U JP10093873 U JP 10093873U JP S5047482 U JPS5047482 U JP S5047482U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10093873U
Other versions
JPS619195Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1973100938U priority Critical patent/JPS619195Y2/ja
Publication of JPS5047482U publication Critical patent/JPS5047482U/ja
Application granted granted Critical
Publication of JPS619195Y2 publication Critical patent/JPS619195Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1973100938U 1973-08-28 1973-08-28 Expired JPS619195Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1973100938U JPS619195Y2 (ja) 1973-08-28 1973-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1973100938U JPS619195Y2 (ja) 1973-08-28 1973-08-28

Publications (2)

Publication Number Publication Date
JPS5047482U true JPS5047482U (ja) 1975-05-12
JPS619195Y2 JPS619195Y2 (ja) 1986-03-22

Family

ID=28306985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1973100938U Expired JPS619195Y2 (ja) 1973-08-28 1973-08-28

Country Status (1)

Country Link
JP (1) JPS619195Y2 (ja)

Also Published As

Publication number Publication date
JPS619195Y2 (ja) 1986-03-22

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