JPS5046277A - - Google Patents
Info
- Publication number
- JPS5046277A JPS5046277A JP9748073A JP9748073A JPS5046277A JP S5046277 A JPS5046277 A JP S5046277A JP 9748073 A JP9748073 A JP 9748073A JP 9748073 A JP9748073 A JP 9748073A JP S5046277 A JPS5046277 A JP S5046277A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Dicing (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9748073A JPS5639054B2 (ja) | 1973-08-29 | 1973-08-29 | |
| US476620A US3912563A (en) | 1973-06-05 | 1974-06-05 | Method of making semiconductor piezoresistive strain transducer |
| CA202,036A CA994005A (en) | 1973-06-05 | 1974-06-10 | Method of making semiconductor piezoresistive strain transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9748073A JPS5639054B2 (ja) | 1973-08-29 | 1973-08-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5046277A true JPS5046277A (ja) | 1975-04-24 |
| JPS5639054B2 JPS5639054B2 (ja) | 1981-09-10 |
Family
ID=14193434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9748073A Expired JPS5639054B2 (ja) | 1973-06-05 | 1973-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5639054B2 (ja) |
-
1973
- 1973-08-29 JP JP9748073A patent/JPS5639054B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5639054B2 (ja) | 1981-09-10 |