JPS504550B1 - - Google Patents
Info
- Publication number
- JPS504550B1 JPS504550B1 JP12178370A JP12178370A JPS504550B1 JP S504550 B1 JPS504550 B1 JP S504550B1 JP 12178370 A JP12178370 A JP 12178370A JP 12178370 A JP12178370 A JP 12178370A JP S504550 B1 JPS504550 B1 JP S504550B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12178370A JPS504550B1 (ja) | 1970-12-29 | 1970-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12178370A JPS504550B1 (ja) | 1970-12-29 | 1970-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS504550B1 true JPS504550B1 (ja) | 1975-02-20 |
Family
ID=14819768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12178370A Pending JPS504550B1 (ja) | 1970-12-29 | 1970-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS504550B1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006022355A (ja) * | 2004-07-06 | 2006-01-26 | Shincron:Kk | 補正板に加熱手段を設けた膜形成装置 |
-
1970
- 1970-12-29 JP JP12178370A patent/JPS504550B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006022355A (ja) * | 2004-07-06 | 2006-01-26 | Shincron:Kk | 補正板に加熱手段を設けた膜形成装置 |