JPS5045445Y2 - - Google Patents

Info

Publication number
JPS5045445Y2
JPS5045445Y2 JP9225971U JP9225971U JPS5045445Y2 JP S5045445 Y2 JPS5045445 Y2 JP S5045445Y2 JP 9225971 U JP9225971 U JP 9225971U JP 9225971 U JP9225971 U JP 9225971U JP S5045445 Y2 JPS5045445 Y2 JP S5045445Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9225971U
Other languages
Japanese (ja)
Other versions
JPS4847410U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9225971U priority Critical patent/JPS5045445Y2/ja
Publication of JPS4847410U publication Critical patent/JPS4847410U/ja
Application granted granted Critical
Publication of JPS5045445Y2 publication Critical patent/JPS5045445Y2/ja
Expired legal-status Critical Current

Links

JP9225971U 1971-10-07 1971-10-07 Expired JPS5045445Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9225971U JPS5045445Y2 (en) 1971-10-07 1971-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9225971U JPS5045445Y2 (en) 1971-10-07 1971-10-07

Publications (2)

Publication Number Publication Date
JPS4847410U JPS4847410U (en) 1973-06-21
JPS5045445Y2 true JPS5045445Y2 (en) 1975-12-23

Family

ID=28005776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9225971U Expired JPS5045445Y2 (en) 1971-10-07 1971-10-07

Country Status (1)

Country Link
JP (1) JPS5045445Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10755025B2 (en) 2014-09-22 2020-08-25 Asml Netherlands B.V. Process window identifier
US11080459B2 (en) 2014-06-10 2021-08-03 Asml Netherlands B.V. Computational wafer inspection

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11080459B2 (en) 2014-06-10 2021-08-03 Asml Netherlands B.V. Computational wafer inspection
US10755025B2 (en) 2014-09-22 2020-08-25 Asml Netherlands B.V. Process window identifier
US11379648B2 (en) 2014-09-22 2022-07-05 Asml Netherlands B.V. Process window identifier

Also Published As

Publication number Publication date
JPS4847410U (en) 1973-06-21

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