JPS5042095Y2 - - Google Patents

Info

Publication number
JPS5042095Y2
JPS5042095Y2 JP3528771U JP3528771U JPS5042095Y2 JP S5042095 Y2 JPS5042095 Y2 JP S5042095Y2 JP 3528771 U JP3528771 U JP 3528771U JP 3528771 U JP3528771 U JP 3528771U JP S5042095 Y2 JPS5042095 Y2 JP S5042095Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3528771U
Other languages
Japanese (ja)
Other versions
JPS4728904U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3528771U priority Critical patent/JPS5042095Y2/ja
Publication of JPS4728904U publication Critical patent/JPS4728904U/ja
Application granted granted Critical
Publication of JPS5042095Y2 publication Critical patent/JPS5042095Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP3528771U 1971-04-30 1971-04-30 Expired JPS5042095Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3528771U JPS5042095Y2 (https=) 1971-04-30 1971-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3528771U JPS5042095Y2 (https=) 1971-04-30 1971-04-30

Publications (2)

Publication Number Publication Date
JPS4728904U JPS4728904U (https=) 1972-12-02
JPS5042095Y2 true JPS5042095Y2 (https=) 1975-11-29

Family

ID=27901819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3528771U Expired JPS5042095Y2 (https=) 1971-04-30 1971-04-30

Country Status (1)

Country Link
JP (1) JPS5042095Y2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63191593U (https=) * 1987-05-28 1988-12-09
JPH06295914A (ja) * 1991-10-24 1994-10-21 Tokyo Electron Tohoku Ltd 加熱処理装置

Also Published As

Publication number Publication date
JPS4728904U (https=) 1972-12-02

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