JPS5042063U - - Google Patents
Info
- Publication number
- JPS5042063U JPS5042063U JP9535073U JP9535073U JPS5042063U JP S5042063 U JPS5042063 U JP S5042063U JP 9535073 U JP9535073 U JP 9535073U JP 9535073 U JP9535073 U JP 9535073U JP S5042063 U JPS5042063 U JP S5042063U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9535073U JPS5042063U (ja) | 1973-08-15 | 1973-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9535073U JPS5042063U (ja) | 1973-08-15 | 1973-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5042063U true JPS5042063U (ja) | 1975-04-28 |
Family
ID=28291225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9535073U Pending JPS5042063U (ja) | 1973-08-15 | 1973-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5042063U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017087185A (ja) * | 2015-11-16 | 2017-05-25 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
-
1973
- 1973-08-15 JP JP9535073U patent/JPS5042063U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017087185A (ja) * | 2015-11-16 | 2017-05-25 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |