JPS5040638B1 - - Google Patents
Info
- Publication number
- JPS5040638B1 JPS5040638B1 JP45022428A JP2242870A JPS5040638B1 JP S5040638 B1 JPS5040638 B1 JP S5040638B1 JP 45022428 A JP45022428 A JP 45022428A JP 2242870 A JP2242870 A JP 2242870A JP S5040638 B1 JPS5040638 B1 JP S5040638B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45022428A JPS5040638B1 (ja) | 1970-03-17 | 1970-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45022428A JPS5040638B1 (ja) | 1970-03-17 | 1970-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5040638B1 true JPS5040638B1 (ja) | 1975-12-25 |
Family
ID=12082406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45022428A Pending JPS5040638B1 (ja) | 1970-03-17 | 1970-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5040638B1 (ja) |
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1970
- 1970-03-17 JP JP45022428A patent/JPS5040638B1/ja active Pending