JPS5039723A - - Google Patents

Info

Publication number
JPS5039723A
JPS5039723A JP48090956A JP9095673A JPS5039723A JP S5039723 A JPS5039723 A JP S5039723A JP 48090956 A JP48090956 A JP 48090956A JP 9095673 A JP9095673 A JP 9095673A JP S5039723 A JPS5039723 A JP S5039723A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48090956A
Other versions
JPS5113486B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48090956A priority Critical patent/JPS5113486B2/ja
Publication of JPS5039723A publication Critical patent/JPS5039723A/ja
Publication of JPS5113486B2 publication Critical patent/JPS5113486B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
  • Surface Treatment Of Glass (AREA)
  • Coating By Spraying Or Casting (AREA)
JP48090956A 1973-08-15 1973-08-15 Expired JPS5113486B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48090956A JPS5113486B2 (ja) 1973-08-15 1973-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48090956A JPS5113486B2 (ja) 1973-08-15 1973-08-15

Publications (2)

Publication Number Publication Date
JPS5039723A true JPS5039723A (ja) 1975-04-12
JPS5113486B2 JPS5113486B2 (ja) 1976-04-30

Family

ID=14012925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48090956A Expired JPS5113486B2 (ja) 1973-08-15 1973-08-15

Country Status (1)

Country Link
JP (1) JPS5113486B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008095132A (ja) * 2006-10-06 2008-04-24 Ulvac Material Kk 真空成膜装置、エッチング装置等における装置構成部品、およびその製造方法と再生方法
JPWO2014002498A1 (ja) * 2012-06-27 2016-05-30 東ソー株式会社 複合プレートおよびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008095132A (ja) * 2006-10-06 2008-04-24 Ulvac Material Kk 真空成膜装置、エッチング装置等における装置構成部品、およびその製造方法と再生方法
JPWO2014002498A1 (ja) * 2012-06-27 2016-05-30 東ソー株式会社 複合プレートおよびその製造方法

Also Published As

Publication number Publication date
JPS5113486B2 (ja) 1976-04-30

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